Vacuum-to-vacuum entry system apparatus

摘要

A vacuum-to-vacuum entry system which uses a rotary transport to transfer workpieces between two vacuum environments in a direction parallel to its axis of rotation and through the interface of a combination rotary gas bearing and seal. The combination gas bearing and seal seals off a zone in the gap between its two planar bearing surfaces that is radially offset from the axis of rotation of the bearing which is coincidental with the transport axis. Two arcuate gas sink channels on one of the bearing surfaces sink the gas of the bearing away from the zone. The bearing gas outside the zone in the gap and the two channels coact to effect a peripheral seal about the zone allowing the two vacuum environments when appropriately aligned to be in sealed communication with each other through the zone. A preferred embodiment is described for the transfer of ceramic substrates with circuitized surfaces between two vacuums environments.