Coordinate-measuring device for an enlarger copier

摘要

The coordinate measuring device for an enlarger copier contains a coordinate stage (1) for arranging an object (14) to be processed, a lens (17) and a reading system for displacements of the coordinate stage (1), which includes diffraction gratings (2, 3, 4) with respective illuminating devices (11, 12, 13) and photoreceiving devices (8, 9, 10). The device is characterised in that the diffraction gratings (2, 3, 4) are arranged in a number of at least three on the coordinate stage (1) such that at least one of them is located at an angle to the others, and that they are produced from an optically transparent material and have lines (18) in the direction of the optical axis of the lens (17). Each pair composed of an illuminating device (13) and a photoreceiving device (10) is arranged on a fixed baseplate (15) on one side of the respective diffraction grating (4), and an aid (roof reflector 7) for reflecting a pair of bundles diffracted at the grating (4) is set up on the photoreceiving device (10) on the other side of said diffraction grating (4) in the beam path of the illuminating device (13). <IMAGE>