| 摘要 |
PURPOSE:To obtain a gas permselective membrane reduced in a characteristic change at the time of the rising in temp. and keeping separation characteristics even at high temp., by successively applying plasma treatments of a polymerizable org. compound and non-polymerizable gas to the surface of a polymer support. CONSTITUTION:A polymer support is set in a plasma polymerization apparatus which is, in turn, evacuated to 0.01Torr or less. Power of 10-100W is applied, while a polymerizable org., compound such as an org. silane compound having one or more of a double bond or triple bond is supplied through a flowmeter so as to reach 5Torr or less, to generate glow discharge. After a plasma polymerization membrane with a necessary thickness was accumulated, discharge is stopped and the polymerization apparatus is evacuated to 0.01Torr or less while non-polymerizable gas such as inorg. gas is introduced into said apparatus so as to reach 5Torr or less and power of 20-300W is applied for 10-1,800sec to perform plasma treatment. The average pore size of the support is pref. 0.1mum or less. |
