TRANSITION METAL NITRIDE THIN FILM DEPOSITION USING TRANSITION METAL ALIPHATIC AMINES OR AZIDES,申请号IL19850076098-传众专利搜索

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发明名称	TRANSITION METAL NITRIDE THIN FILM DEPOSITION USING TRANSITION METAL ALIPHATIC AMINES OR AZIDES
摘要
申请公布号	IL76098(D0)	申请公布日期	1985.12.31
申请号	IL19850076098	申请日期	1985.08.15
申请人	MORTON THIOKOL, INC.	发明人
分类号	C01B21/06;C23C16/34;H01L21/285;H01L29/45;(IPC1-7):C23C/	主分类号	C01B21/06
代理机构		代理人
主权项
地址

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