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发明名称
ELECTRON BEAM EXPOSURE SYSTEM
摘要
申请公布号
EP0047989(B1)
申请公布日期
1985.12.27
申请号
EP19810107166
申请日期
1981.09.10
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
YOSHIKAWA, RYOICHI
分类号
H01J37/304;H01L21/30;H01L21/027;(IPC1-7):H01J37/30
主分类号
H01J37/304
代理机构
代理人
主权项
地址
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