| 摘要 |
PURPOSE:To prevent wear and head stick by forming a thin plasma-polymerized film of hydrocarbon onto a thin film consisting of a non-magnetic metal, the oxide, carbide and nitride of an inorg. compd. and carbon thereby forming two- layered protective films. CONSTITUTION:The 1st protective film 3 consisting of at least one kind selected from the non-magnetic metal such as Rh, the oxide such as SiO2, the carbon such as graphite, the carbide such as SiC and the nitride such as CrN and the 2nd protective film 4 formed by the plasma polymn. of the hydrocarbon are formed on a thin ferromagnetic metallic film 2 on a non-magnetic base material. The hydrocarbon (e.g.: C2H2, C4H10, etc.) is fed as it is into a reactor 8 or is fed therein after the hydrocarbon is gasified to form the gaseous raw material. The inside of the reactor is evacuated to 0.001-10Torr and, for example, 200- 2,000V DC voltage is impressed between electrodes 6 and 7 to generate plasma. The plasma polymn. is thus effected on a magnetic storage medium 5 installed on the electrode 6.
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