| 摘要 |
PURPOSE:To manufacture a fine information signal pattern having less defects in a short period with less stages and good productivity by forming an org. film on a substrate and irradiating a charge particle beam such as electron or ion beam to said film thereby forming the rugged pattern. CONSTITUTION:The prescribed pattern 14 is obtd. by a method consisting in forming the org. film of a resist such as polymethyl methacrylate on the substrate 11 consisting of glass or metal, etc. for an optical disc, irradiating the charge particle beam 12 (shown by an arrow) thereto from the film 10 side to produce the latent image decomposed by heating with the org. film 13 in the irradiated part then blowing a clean high-temp. gas to the film to evaporate the irradiated part 13. Ni or the like is deposited by evaporation over the entire surface to form a metallic film 15, thereby manufacturing a stamper. The stamper is thus directly formed to the substrate 11, by which the number of stages is decreased and the finer pattern than the pattern formed heretofore by a laser beam is obtd. with less defects and good productivity.
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