| 摘要 |
PURPOSE:To measure the minute displacement of an object to be measured in a non-contact state with good accuracy, by forming a composite resonator by constituting so as to be capable of feeding back reflected light from the object to be measured to a semiconductor laser. CONSTITUTION:When an object 4 to be measured is displaced in x- or y-direction in the drawing when the quantity of reflected light, that is, the quantity of feedback light is a proper definite value, the magnitude change in light output generates every when displacement quantity (x) changes by the half lambda/2 of the oscillation wavelength lambda of a semiconductor laser 1 from the relation between phases of emitted light and reflected light of the semiconductor laser 1 and light output is fluctuated. The light output of the semiconductor laser 1, that is, the input of a light detector 5 comes to a high level or a low level corresponding to a direction along which the change direction of the object 4 to be measured, that is, the speed of said object 4 to be measured approaches or goes away from the semiconductor laser 1. Therefore, the number of fluctuations of light output and a light output level are detected by the light detector 5 to make it possible to know the displacement direction and quantity of the object 4 to be measured.
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