摘要 |
PURPOSE:To provide the titled composite membrane for gas separation having high permeability and selectivity and excellent mechanical strength, workability, resistance to chemicals, and durability by forming a thin film consisting of poly (perfluoro chemical) on the surface of a porous supporting membrane. CONSTITUTION:A porous supporting membrane is fixed on a rotary disk 1 of a plasma polymerization device. A monomer of a perfluoro chemical such as perfluorotributylamine is vaporized while evacuating the inside of a chamber 2 to fill the inside of the chamber with the vaporized monomer. Then glow discharge is generated between electrodes 3 while rotating the rotary disk 1, and a thin film of the poly(perfluoro chemical) is formed on the surface of the supporting membrane while plasma-polymerizing the perfluoro chemical to obtain the composite membrane for gas separation. |