| 摘要 |
PURPOSE:To inhibit the overheat of reflectors due to the absorption of laser beams by strengthening reflector cooling by a method wherein a gas passage which circulates part of the laser gas through part of the reflectors is provided with a blower which forcibly circulates the laser gas. CONSTITUTION:An auxiliary blower 58 which forcibly circulates the laser gas is installed to the inlet of the gas passage 55 formed between a bellows 54 and a duct 46. A filter 52 is installed to the blower 58 on the intake side. In the titled device thus constructed, the laser gas is forcibly circulated through the passage 55, and the reflectors 28 and 30 are forcibly cooled. |
