| 摘要 |
PURPOSE:To reduce the size and weight of the pressure sensor without lowering pressure detection prescision by providing a vacuum hollow part corresponding to the vacuum gap in a substrate across the fixed electrode support part of the substrate as a partition wall, and allowing the vacuum hollow part and vacuum gap to communicate with each other. CONSTITUTION:The vacuum hollow part 6 which has the fixed electrode support part 7 of the substrate provided with the fixed electrode 4 as a thin-film partition wall is provided in the substrate 1 corresponding to the vacuum gap 2, and the hollow part 6 and vacuum gap 2 communicate with each other through numbers of holes 8 which penetrate the fixed electrode support part 7. In this case, the substrate 1 is thin, so even if the operation of the external force due to measured pressure P exerts influence on the overall thickness of the substrate 1, the fixed electrode support part 7 serves as the partition wall and both sides of the vacuum gap 2 and vacuum hollow part 6 are held at the same pressure, so that the fixed electrode support part 7 is never displaced. Consequently, the size and weight are reduced without lowering pressure detection precision. |
