| 摘要 |
PURPOSE:To minimize the occupation space in the vertical direction by a method wherein wafer baskets are loaded at a required level by repeating the following actions successively in such a manner that the second wafer basket is stacked on the first wafer basket. CONSTITUTION:In previous agreement with the upper surface of the container 1 of a drawer can 3, a wafer basket 2a is carried by a controller 7 onto the can 3, and at the same time with loading end the controller 7 sets in action and then once stops the can 3 by the descent of the height of the wafer basket. A wafer basket 2b is stacked on the wafer basket 2a by the action of the controller 7. Next, a wafer basket 2c is loaded on the wafer basket 2b again by the controller 7. A required quantity of wafer baskets are loaded on the can 3 by repeating such actions, and the furnace core tube is sealed with sealing caps 4 and 6; thereafter, a prescribed heat treatment is carried out by introducing a necessary gas into the furnace core tube. This manner affords the saving of the space in the vertical direction.
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