CONCENTRATION DISTRIBUTION MEASURING APPARATUS FOR ELEMENT IN SOLID

摘要

PURPOSE:To measure concentration distribution quickly in a non-destructive manner by calculating a parameter necessary for specifying an analysis function expressing the concentration distribution based on outputs of a plurality of fluorescent X ray intensity measuring means different in the measuring conditions. CONSTITUTION:An X ray tube 2 and a fluorescent X ray detector 3 provided on the surface of a smaple 1 to be measured are driven with a driving mechanism 10 to change the incident angle X and drawing angle theta. A high voltage is applied to the X-ray tube 2 from a high voltage power source 4 while an output of the detector 3 is applied to an amplifier 5, a pulse height analyzer 6 and a counter 7 sequentially. A signal corresponding to the value of control obtained from a controller 11 of the driving mechanism 10 and an output of the counter 7 are applied to an arithmetic unit 8 and the results of the computation are applied to an input/output terminal 9.