| 摘要 |
PURPOSE:To extract the three-dimensional information relating to the rugged shape of a sample surface from two-dimensional video signals by detecting the video signals of the sample surface by using at least one set of detectors which are disposed symmetrically with the optical axis and subjecting the detection signals thereof to prescribed processing. CONSTITUTION:The video signals obtd. by scanning the sample 4 by a scanning electron microscope 1 under the control of a control part 11 and detecting the same with one set of the signal detectors 5a, 5b which are disposed symmetrically with the opticl axis are fed via signal amplifiers 6a, 6b to a display device 8. On the other hand, the outputs from the amplifiers 6a, 6b are passed through a differential amplifier 12, the differential signal is compared with a reference level in a signal standard circuit 14 of a signal processing part 13 and is thereby made into the square wave signal having positive and negative polarities. An inclination direction and grade are extracted from the polarities and signal width of the square wave signal in an inclination extracting circuit 15. The rugged shape condition on the surface of the sample 4 is reproduced in a shape reproducing circuit 16.
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