| 摘要 |
PURPOSE:To improve controllability of plasma, and to stabilize film-forming conditions, by making plasma exist in the vicinity of a plasma outlet of a plasma generation pipe. CONSTITUTION:The plasma generation pipe 23 having the plasma outlet 32 in a tapered shape at the end is inserted into the vacuum tank 21, the induction coil 27 is wound round the outside face 24 in atmosphere to set a means to provide high-frequency power, and one or more of the gas inlet pipes 29 are set in the outside face 28 in vacuum of the plasma generation pipe 23. And the cylindrical can 33 is laid in the vicinity of the plasma outlet 32, and coating is carried out on the surface of the sheet 35 transferring along the peripheral face 34 of the cylindrical can 33 by gaseous-phase growth of plasma chemistry. USE:Suitable for surface protecting coating of a sheet substrate such as magnetic recording medium, etc.
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