PRODUCTION OF MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To form a thin film magnetic recording medium having the magnetic characteristic equal to or better than the characteristic obtainable by known embodiments by forming the thin film by a simple sputtering condition involving the use of a substrate kept at a temp. above a room temp. in a gaseous argon atmosphere contg. oxygen. CONSTITUTION:An adequate amt. of oxygen is incorporated into the thin film in the stage of sputtering to obtain the nearly amorphous Co-Ni-O film and thereafter the hexagonal Co-Ni film contg. some oxygen is oriented by crystallization under heating so that the C-axis direction thereof parallels with the film plane. The nearly amorphous Co-Ni-O film contg. 10 and off % oxygen can be formed without subjecting the film to special cooling even in the stage of forming the sputtered film at the high speed equal to the speed for forming the sputtered film (25-170Angstrom /min) or at about 300Angstrom /min higher than said speed. The magnetic film equal to or better than the conventional magnetic film is obtd. by the subsequent heat treatment. The coervice force decreases and the medium suitable for high-density magnetic recording is not obtainable when the substrate temp. is increased to 300 deg.C or above and therefore the upper limit thereof is made 300 deg.C.