| 摘要 |
PURPOSE:To obtain a magnetic recording medium having good resistant performance to exfoliation by sputtering a ferromagnetic metal as a target onto the thin ferromagnetic metallic film on a film base in an oxidizing gaseous atmosphere and forming superposedly the oxide film thereof. CONSTITUTION:A vacuum chamber 10 is divided to the 1st and 2nd sub-chambers 21, 22 by shielding plates 11, 12 for sputtering. The film base T made of a resin such as polyethylene terephthalate to be used as a blank material for a video tape is delivered from the chamber 21 and is taken up by a roll 33 in the chamber 22. An inert gas is supplied from the 1st gas feeder 41 to the 1st sub- chamber and from the 2nd gas feeder 42 to the 2nd sub-chamber 22. An oxidizing atmosphere gas is further supplied from the 3rd gas feeder 43 to the chamber 22. Targets 61, 62, ferromagnetic blocks 63, 64 and magnetic blocks 65, 66 are provided to sputtering devices 51, 52. A high negative voltage is supplied to target plates 67, 68 and the base T is sputtered.
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