| 摘要 |
PURPOSE:To perform measurement highly accurately without damaging a material to be machined, by coating the surface of the material to be machined comprising a non-conductive material with a thin conductive film, and measuring the coordinate values of the coating surface by a coordinate measuring machine using a conducting measuring probe. CONSTITUTION:A thin conductive film 12 is formed on the entire surface of a material to be machined 11 comprising a non-conductive material by electroless plating, evaporation and the like. Thus the surface of the material to be machined 11 is made to be a perfect conductor. Then, a terminal 14 of the material to be measured, which is connected to a controller 13 of a coordinate measuring machine, is fixed on the thin film 12 at a specified position. A conducting measuring probe 15, which is connected to the controller 13, is held by a holder 16 so that the probe can be moved along a part to be measured 17 of the material to be machined 11. The tip of the measuring probe 15 is contacted with the specified surface of the part to be measured 17, and an electric closed circuit is formed. The values of the coordinates can be read by an operating part of the coordinate measuring machine. Therefore, compression to the material to be machined is not necessary. The tip of the measuring probe can be made thin. Therefore, even the complicated and delicate configuration can be measured highly accurately.
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