| 摘要 |
PURPOSE:To reliably put an improper mark by contacting and melting a paraffin rod with a heated semiconductor substrate. CONSTITUTION:A semiconductor substrate 12 is placed on a heated substrate set base 21. A paraffin rod 22 is set to the base 21 opposite to the top. A measuring instrument 30 measures a plurality of semiconductor devices 11a, 11b. In order to put an improper mark, the electric characteristics of devices 11a, 11b are first measured by the instrument 30. If decided as improper, a coil 25 is excited through a drive circuit 28, a head 26 of a movable marking unit 23 is moved down in the direction of an arrow (b), a holder 24 is opened, and the rod 22 is moved down in the direction of an arrow (c). The paraffin material of the rod 22 is melted when contacted with the device 11b, and adhered to the device 11b. The mark remains as white point on the device 11b after the temperature falls. |
