| 摘要 |
PURPOSE:To dissolve a measuring error in the X direction, and to execute a measurement with high accuracy by providing a device for detecting an inclination quantity of a support, and a circuit for correcting a read value of an X direction scale installed along the digit part. CONSTITUTION:An air micrometer 51 being a device for detecting an inclination quantity of a lower end supporting part 32 as a displacement in the horizontal direction on an object placing plate 21 is provided on a position of the lower side of one lower end supporting part 32. Also, a blown surface 52 to which air is blown from the air micrometer 51 is placed on the object placing plate 21 so that an interval to the micrometer 51 becomes constant. Moreover, this machine is provided with a correcting circuit (omitted in the figure) for inputting a detecting signal of the air micrometer 51, and correcting a moving extent in the X direction detected through an X direction scale 27A, etc. In this way, a measuring error in the X direction is dissolved, and especially, even in case when the whole device is large in size and heavy in weight, a measurement can be executed with high accuracy. |
