| 摘要 |
PURPOSE:To shorten the total process time of vacuum treatment by shortening the cooling time of a substance to be treated, by providing inert gas introducing and exhaust ports to a vacuum container and providing a gas cooling pipe for recirculating inert gas from the gas exhaust port to the gas introducing port. CONSTITUTION:Valves 8, 12, 13 are opened after vacuum treatment was finished to introduce inert gas into a vacuum container 1 from a gas introducing pipe 14. At this time, a fan 11 is operated and the inert gas is recirculated through a gas cooling pipe 7 along the direction shown by the arrow. The high temp. substance to be treated in the vacuum container 1 is cooled by the inert gas while the temp. raised inert gas reaches a heat exchanger 10 from a gas exhaust port 4 through the cooling pipe 7 and cooled through the heat exchange with a cooling medium and the cooled inert gas is again introduced into the vacuum container 1 from a gas introducing port 3 to cool the substance to be treated. The cooled inert gas is introduced into the vacuum container 1 without the rising in temp. because the gas cooling pipe 7 is cooled by a cooling apparatus 15. |
