| 摘要 |
PURPOSE:To simply set the position of an angle change mechanism to a three- dimensional drive mechanism with high accuracy, by effectively putting the light spot irradiation function of a light spot detection sensor and the irradiation angle change function of an angle change mechanism to practical use. CONSTITUTION:To the surface of an object 30 to be irradiated, one reference line 31, of which the Y-coordinates are constant value, is drawn. Next, an angle change mechanism 4 and a three-dimensional mechanism are driven so as to form the image of the light spot P1 of a light spot detection sensor 3 to one point Pr on the reference line 31. Subseqeuntly, the angle change mechanism 4 is rotated around an S-axis by an arbitrary angle thetas and the position of the light spot P2 on the object 30 to be irradiated at said angle is confirmed. When no light spot P2 is rotated by a proper amount. By repeating these operations before the position of the light spot P2 comes onto the reference line 31, the position of the angle change mechanism 4 is set to the three-dimensional drive mechanism.
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