| 摘要 |
PURPOSE:To enable a sufficiently minute area on the sample to be analyzed so as to increase the analytical accuracy of a surface analyzer by installing a projection-type energy filter with the function of image observation between a secondary-ion-discharging sample and a tetrode-type mass spectrometer. CONSTITUTION:A thick ion beam 10 discharged from an ion gun 1 is irradiated upon a sample 2. A discharged secondary ion 11 is projected by the electrostatic lens 9 of an image-projection-type energy filter 8 and imaged as a real image upon an aperture plate 7 placed in front of a tetrode-type mass spectrometer 3. The thus formed image is scannned within the range of the size of the image itself by means of a deflection plate 4 to which scanning voltage from a power supply 5 is applied, thereby displaying secondary ions 11 of this image entering the spectrometer 3 on a cathode-ray tube 6 after subjecting them to mass spectrometry. As a result, any inhomogeneous etching of the sample can be prevented because the ion beam is not drawn thin. Additionally, it is possible to obtain a surface analyzer with high accuracy by enabling analysis of a minute area on the sample to be performed. |
