| 摘要 |
PURPOSE:To enhance the purity of pure steam or distilled water by removing gases which are mixed in high-purity water. CONSTITUTION:A gas discharge mechanism 20 consisting of a float breather valve 22, solenoid valves 24 and 26, a bacteria filter 28, etc. is provided to a pipeline 5 wherein deionized water which is a kind of high-purity water flows in a liquid state in a manufacturing apparatus of pure steam or distilled water wherein high-purity water is evaporated in an evaporator 6 by heated steam. The air, decomposed gas of bacteria, etc. which are mixed in deionized water when the water is in a liquid state are removed in this way, and high-purity steam or distilled water can be manufactured.
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