Gas stream purification

摘要

A process for the removal of ethylene from silane. Hydrocarbon-contaminated silane is preferably first distilled in a conventional distillation column to remove hydrocarbons boiling higher and lower than silane. Ethylene is removed by passing the silane stream through a column of zeolite, preferably zeolite A having a 4 Angstrom micropore. The 4 Angstrom zeolite A has a high capacity for ethylene and is readily regenerated.