| 摘要 |
PURPOSE:To facilitate the adjustment of relative positions of a probe and a pad electrode of a semiconductor element which is to be measured, by detecting a pressure applied to the probe when brought into contact with the pad electrode, and adjusting a voltage applied to an electrostriction element on the basis of the signal representing the detected pressure. CONSTITUTION:A circular opening 8 is provided in the center of a printed board 1 having printed wiring 5 formed on the surface thereof. A substrate 2 provided with probes 3 is fitted into the opening 8 and mounted on the printed board 1 with a plurality of electrostriction elements 4 interposed therebetween. A supply voltage and a test signal which are applied from the printed wiring 5 are transmitted to the probes 3 through jumper wires 6 and through-holes 10. Sensor elements 7 are respectively mounted on the probes 3, so that the amount of displacement of each of the probes 3 caused by a pressure applied to the probe 3 when brought into contact with a pad electrode to be measured is converted into an electric signal. The electric signals concerning contact conditions, which are respectively taken out from the sensor elements 7, are arithmetically processed, and an average value of the voltages respectively applied to the electrostriction elements 4 is obtained, together with a deviation of the voltage applied to each element 4 from the average value. |
