| 摘要 |
PURPOSE:To collect radiation from a specific diffraction spot over a large cubic angle by introducing a diffracted image formed on a fluorescent plate by rays reflected and diffracted by the sample surface to a photoelectric converter through an optical lens and an optical fiber. CONSTITUTION:In a scanning-type reflected-electron-diffracting microscope, a primary electron beam 4 is converted on the surface of a sample 7 and scanned over its surface by the operation of a deflecting coil 5 to produce reflected diffracted rays 8. The thus produced rays 8 are displayed on a fluorescent plate 9 as a diffracted image which is then observed through a peep window 10. The peep window 10 is provided with an optical lens 15 to focus the radiation of a fluorescent plate 19 on one end surface of an optical fiber 16 and to introduce the focused radiation into a photoelectric converter 12 through a fiber 16. As a result, the radiation of a specific diffraction spot can be efficiently collected and converted into an electric signal, thereby producing distinct images with a large signal/noise ratio as electron microscope images. |
