| 摘要 |
PURPOSE:To form a ceramic actuator, in which no crack is generated in a laminate, by manufacturing the laminate by superposing a plurality of green sheets consisting of piezoelectric ceramics, baking the laminate to shape air gap sections and filling the air gap sections with an insulator. CONSTITUTION:A member 20 disappearing by heating is shaped along the end surface of one surface of a rectangular green sheet 1 to a long band shape. Electrodes 2, 2a are formed to other sections. A plurality of the green sheets 1 are superposed, thus shaping a laminate 40. The disappearing members 20 disappear by baking the laminate 40, and air gap sections 30 are formed. The air gaps 30 are filled with an insulator 31. Electrode leads 3 and 4 are shaped to the side surface of the laminate 40 filled with the insulator 31, and connected to electrodes 2 and 2a for each laminated ceramic sheet. An electric field is applied through lead wires 5 and the electrode leads 3, 4 from a power supply 6. |
