| 摘要 |
In a humidity sensor having an electrically insulating substrate support (1), a pair of electrodes (3, 4) positioned opposite one another on one side of the substrate support (1), and a humidity-sensitive layer which connects the two electrodes (3, 4) with one another and whose electrical resistance changes according to the humidity, the electrodes (3, 4) are connected to a heating voltage source (8), and on the other side of the substrate support (1) a thin-film precision resistor (2) designed as a resistance thermometer is applied. In order to fabricate the humidity sensor, the one side of the substrate support (1) has the thin-film precision resistor (2) designed as a resistance thermometer applied to it, and applied to the other side of the substrate support (1) there are printed micro-conductors lying opposite one another and serving as electrodes (3, 4) and a humidity-sensitive layer which bridges the interstice between the two printed micro-conductors. <IMAGE>
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