| 摘要 |
PURPOSE:To detect rapidly and precisely a curve of a long object such as a semiconductor, by applying a light onto the long object so that the shadow thereof projected onto an image sensor becomes the mininum, by binary-coding picture element signals by the image sensor, and by subjecting the binary-coded signals to image processing. CONSTITUTION:A light is applied from a light source 2 onto a long object, e.g. a semiconductor lead 3, so that the shadow of the lead 3 projected onto an image sensor 1 becomes the minimum. When the shadow 7 of the lead 3 is projected on the light-receiving surface of the image sensor 1, detected waveforms are binary-coded by a signal storing unit 4. For instance, the level of a waveform l1 is coded to logic 0 and the level of a waveform l2 to logic 1. Next, the binary-coded signals thus obtained are inputted to a memory unit 5 and compared in an image processing unit 6 with a reference signal of a lead having no curve, which is stored beforehand. Since the light is applied to be received by the image sensor so that the shadow of the long object becomes the minimum, the number of required picture elements is small, and thus detection is performed at high speed and with excellent precision. |
