| 摘要 |
PURPOSE:To prevent the breakage of a vaccum container by allowing dried gas to pass through a high-pressure valve after a prescribed time after a vacuum valve is opened when the dried gas is introduced into a superhigh vacuum chamber. CONSTITUTION:When the instruction for exhaust stop and generation of atmospheric pressure is received during vacuum exhaust operation, a vacuum pump 2 stops operation, and a vacuum valve 7 is opened, and a high-pressure valve 6 is opened after a prescribed time. When the pressure in a superhigh vacuum chamber 1 becomes close to the atmospheric pressure, a sensor 8 operates to set a timer. When the timer starts operation, the high-pressure valve 6 is closed. Therefore, even if a reducing valve 5B for a high-pressure gas cylinder 5 is set too high, the internal pressure of the vacuum chamber 1 is kept at the pressure close to the atmospheric pressure, and the breakage of the system and the operation trouble of each vacuum valve can be prevented.
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