| 摘要 |
PURPOSE:To extend the life of an electrode by disposing a coaxial annular magnetic pole on the outside of the magnetic pole disposed coaxially with the center of a target and making movable at least one of the magnetic poles along the axis. CONSTITUTION:The circular columnar magnetic pole 13 is disposed coaxially with the center of the circular sputtering target 11 and an annular magnetic pole 14 is disposed on the same axis. The magnetic poles 13, 14 are electrically coupled to each other by means of a yoke 15. An anode 17 is installed to face the target 11 and a substrate 18 is held thereon. A moving mechanism 19 moves axially the pole 13 relatively with the pole 14. The region of magnetic lines of force parallel with the surface of the target 11 is changed in the radial direction of the target 11 by such mechanism, by which the eroding area of the surface is widened. The utilizing rate is thus increased and the life of the electrode is extended. |
