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发明名称
摘要
申请公布号
JPS6050057(B2)
申请公布日期
1985.11.06
申请号
JP19780074394
申请日期
1978.06.19
申请人
NIPPON ELECTRIC CO
发明人
NAKAMURA MASARU
分类号
H01L23/522;H01L21/28;H01L21/283;H01L21/314;H01L21/316;H01L21/768
主分类号
H01L23/522
代理机构
代理人
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