DECOMPOSING DEVICE BY GLOW DISCHARGE

摘要

PURPOSE:To deposit uniformly the decomposed components of a reactive gas simultaneously on plural base bodies by enclosing the entire film depositing surface of the base bodies with electrodes for impressing discharge voltage and maintaining the specified distance between the electrodes and the depositing surfaces over the entire region of the depositing surface. CONSTITUTION:Cylindrical electrodes 27 of total 7 pieces including one piece at the center and 6 pieces equidistantly on the same circumference around said piece are disposed in a cylindrical vacuum vessel 22 provided with an introducing port 22a and a leading-out port 22b for a reactive gas to constitute a decomposing device 21 by glow discharge. Preliminarily cleaned cylindrical Al base bodies 11 are coaxially rotatably inserted into the respective electrodes 27. The electrodes 27 enclose the entire film depositing area of the bodies 11 and substantially the distance between the electrodes 27 and the depositing surface of the bodies 11 is maintained substantially specified over the entire depositing area. The reactive gas is supplied into the vessel 22 in such a state and is subjected to decomposition by glow discharge, by which the decomposed components of the reactive gas are uniformly deposited on the bodies 11.