| 摘要 |
PURPOSE:To shorten the time of gas feeding step and to finely regulate gas pressure by connecting a large flow rate tube for bypassing part of a tube with a gas feed tube, and connecting one end of a gas exhaust tube with a vacuum evacuating unit for evacuating a vacuum vessel. CONSTITUTION:A vacuum vessel 1 is evacuated by a vacuum evacuating unit 11, gas is fed by a gas feeding unit, and the vessel 1 is contained with gas atmosphere at the prescribed pressure. Gas is fed from a gas guide tube 3, a gas plasma is generated by a plasma generator 5, an article 2 to be treated is injected from a gas inlet, the gas plasma is exhausted from a gas outlet by the unit 11, the jet stream of the gas plasma is formed from the gas inlet to the gas outlet, and gas flow is regulated by a needle valve 7C of a gas exhaust tube 4 to maintain the gas pressure in the vessel 1 constant. The jet stream of the gas plasma is contacted uniformly with the article 2 to reciprocate in the direction perpendicular to the jet stream of the plasma. Accordingly, the article 2 can be uniformly surface treated. Since a large flow rate tube 9 is used, gas feeding stroke time can be largely shortened, and the gas flow rat can be finely adjusted by the valve 7C. |
