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发明名称
摘要
申请公布号
JPS6036068(Y2)
申请公布日期
1985.10.25
申请号
JP19780173462U
申请日期
1978.12.16
申请人
发明人
分类号
A01K73/04;A01K73/045;(IPC1-7):A01K73/045
主分类号
A01K73/04
代理机构
代理人
主权项
地址
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CONTACT MATERIAL
PRODUCTION OF SEMICONDUCTOR DEVICE HAVING MIS TRANSISTORS