| 摘要 |
PURPOSE:To enable uniform and rapid washing, by partitioning an ultraviolet ray source and an object to be treated in an ultraviolet ray permeable state and supplying gas forming nascent oxygen by ultraviolet rays only to the vicinity of the object to be treated. CONSTITUTION:Ozone or N2O is decomposed by ultraviolet rays of an ultraviolet ray source 2 to form nascent oxygen and the org. contaminant adhered to the surface of an object 5 to be treated is decomposed by said nascent oxygen to perform washing treatment. In this ultraviolet ray treatment method, the ultraviolet ray source 2 and the object 5 to be treated are partitioned by quartz glass 7 or an air curtain in an ultraviolet ray permeable state and gas forming nascent oxygen by ultraviolet rays (e.g., oxygen) is supplied only to the vicinity of the object 5 to be treated while a space including ultraviolet ray source 2 is brought to a vacuum atmosphere or a gaseous atmosphere such as nitrogen absorbing no ultraviolet rays. As a result, uniform and rapid washing is enabled in such a state that the supply amount of treating gas is reduced and the attenuation of ultraviolet rays is low. |
