| 摘要 |
PURPOSE:To cancel a force of dynamical friction and a force of statical friction to improve the positioning precision by giving polygonal line input/output characteristics to a servo amplifier. CONSTITUTION:A moving base 1 is driven by a servo motor 3 and a feed screw 2. The difference between the position detection signal of the moving base 1 detected by a laser interference measuring system 5 and the signal of a target position indicated by an electronic computer 6 is amplified and is given as a speed signal of a speed control system consisting of a servo amplifier 9, a speed generator 4, etc. In this case, diodes D1 and D2 are inserted to a feedback circuit of an operational amplifier 8 in the servo amplifier 9, and the servo amplifier 9 shows polygonal line input/output characteristics by the saturation characteristic. A positioning error + or -deltaalpha determined by a torque Talpha of dynamical friction shows characteristics shown in the figure by a solid line, and the positioning error is reduced in comparison with conventional characteristics shown by a broken line. |
