| 摘要 |
PURPOSE:To omit distance correction and the like and to obtain the profile of a material to be measured accurately at a high speed, by simultaneously detecting the data of the profile of the material to be measured by a multichannel detector without mechanical scanning. CONSTITUTION:At first, a reference plate 23 is placed at a specified position and a radiation generator 21 is operated. Then calibration is performed. The reference thickness data from a multichannel detector 22 are supplied to a plurality of thickness converter parts 45-1, 45-2... in a predetermined order. Then, in place of the reference plate 23, a material to be measured 1 is placed on a specified position, and a radiation beam is projected. The outputs of the multichannel detector 22 are sampled and held, and the results undergoe A-D conversion and are sent to the corresponding thickness converter parts 45-1, 45-2.... Each thickness converter part receives the thickness data in the channel assigned by the transfer, compares the data with the preset reference thickness and computes the deviation. A CPU43 rearranges the deviation data in the order of the channels. The data is sent to an external HOST.CPU and the profile is computed. |
