发明名称 Noninterference optical error sensing system
摘要 A device for examining optical surfaces in an optical train for a laser employs radiation diffusely scattered from the surfaces as input to a noninterfering sampling system that can examine any optical surface in the total system from a single sampling position.
申请公布号 US4547662(A) 申请公布日期 1985.10.15
申请号 US19830475801 申请日期 1983.03.16
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 CORNWELL, DEAN F.
分类号 G01B5/00;G01N21/47;(IPC1-7):G01J1/20 主分类号 G01B5/00
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