| 摘要 |
PURPOSE:To improve the reliability of analysis, by storing high frequency power when the operation of a timer, which is started upon detection of the end of high-frequency-power setting operation, is finished into a reference value memory, thereby simplifying the operation and performing automatic monitoring. CONSTITUTION:A sliding resistor is linked to the knob of the setting variable resistor of a high-frequency-power setting device S. The change in output of said sliding resistor is monitored by a control circuit C. Stop of the change exceeding a specified time is judged as the end of the setting operation. Timer operation for a specified time waiting the stabilization of a high frequency circuit is started. The output value of a high-frequency power detector D at the end of the timer operation is stored in a reference value memory Sm as a monitoring reference value. Then, the output of the detector D is converted into a digital value by an A/D converter. The result is inputted to the circuit C. The circuit C compares the inputted high-frequency power value with the reference value and the upper and lower allowable widths in the memory Sm. When the value is deviated from the allowable range, a signal is outputted to an alarm device A, and the alarm operation is carried out. |
