| 摘要 |
PURPOSE:To obtain high monochromaticity and high diffraction efficiency, by laminating two kinds of monoatomic layer on a substrate crystal at a period so that the desired diffraction angle is obtained with respect to the desired soft X-ray wavelength in such a way that the reflection intensity at the lowest order becomes the maximum value, and specifying the fluctuation of the period. CONSTITUTION:On a GaAs (001) substrate 4, GaAs monoatomic layers 5 and AlAs monoatomic layers 6 are laminated by the following way: the reflection intensity at the lowest order becomes the maximum value at a period D of 22.4Angstrom , at which the desired diffraction angle theta of 129 deg. is obtained by the expression I with respect to the desired soft X-ray wavelength of 10Angstrom . The thickness of the laminated films is made to be 100D, i.e., 2,240Angstrom . The layers 5 and 6 are formed by inputting a molecular beam into the substrate by a molecular beam epitaxial method so that the fluctuation DELTAD of the period D satisfies the expression II. Thus, the spectral crystal for soft X rays characterized by high monochromaticity and high diffraction efficiency can be formed. |
