| 摘要 |
PURPOSE:To make it possible to perform analysis accurately at high incident and extracting angles with respect to the surface of a material to be measured, by determining the composition of plating based on the intensity of fluorescent X rays in L series of metal included in a plated coating, and determining the film thickness based on the intensity of fluorescent X rays in K series of a substrate metal. CONSTITUTION:An Fe-Zn alloy plated layer 1b is formed on, e.g., a substrate metal 1a of Fe. The metal 1a is formed on a steel plate 1. An X-ray source 2 is arranged over the layer 1b. At first, the X-ray source 2 is excited at a low voltage, and the fluorescent X rays in L series of Zn from the plated layer 1b are detected. Then, the X-ray source 2 is excited at a high voltage, and the fluorescent X rays in K series from the substrate metal 1a are detected. The fluorescent X rays are converted into an electric signal by a detector 3. The signal is converted into the intensity of the fluorescent X rays by an amplifier 4, a wave height analyzer 5 and a counter 6. The output of the counter 6 is sent to an operator 7 and compared with the data of the calibration curve, which has been obtained beforehand. Zn is determined based on the L-series fluorescent X rays, and the remaining Fe is determined accordingly. The thickness of the plated layer 1b is determined based on the K-series fluorescent X rays. The results are displayed on a display device 8. Thus the analysis can be performed automatically and accurately. |
