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发明名称
METHOD FOR POLISHING AMORPHOUS ALUMINUM OXIDE
摘要
申请公布号
EP0121707(A3)
申请公布日期
1985.10.09
申请号
EP19840101834
申请日期
1984.02.22
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BASI, JAGTAR SINGH;MENDEL, ERIC
分类号
C09K3/14;B24B37/04;C01F7/02;(IPC1-7):B24B37/04
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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