| 摘要 |
An X ray mask consists of a plate (3) of a suitable material such as borosilicate glass which is non-transparent to X rays, and which has little or no fluorescence when irradiated by X rays. The plate (3) has holes in it to pass the X rays. Each such hole is covered by a membrane (2) of thin, e.g. 3 microns, silicon supported by and integral with a ring (1) of silicon. This ring is secured to the glass plate by electrostatic bonding. <IMAGE>
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