RADIATION-SENSITIVE POLYIMIDE PRECURSOR COMPOSITION DERIVED FROM A DIARYL FLUORO COMPOUND

摘要

A radiation-sensitive polyimide precursor composition comprises a polymer of the formula < IMG > wherein n is a positive integer corresponding to the number of units in the polymer and is sufficiently large to provide the polymer with a number average molecular weight of about 1500-15,000 as determined by vapor pressure osmometry, and wherein for any particular unit in the polymer: denotes isomerism; R1 is a divalent aromatic, aliphatic or cycloaliphatic radical containing at least 2 carbon atoms; R2 and R3 are selected from the group consisting of a hydrogen radical and any organic radical containing a photopolymerizable olefinic double bond; and R4 and R5 are selected from the group consisting of perfluoro and parhalofluoro aliphatic hydrocarbons having 1 to 8 carbons;