| 摘要 |
PURPOSE:To make the grid electrode handling easier while maintaining a constant distance between a grid electrode and a cathode electrode by a method wherein the grid electrode is integrated with substrate with substrate holders to be electrically connected to each other. CONSTITUTION:A cathode electrode 2, an opposite electrode 3 and a heater 5 are provided in a vacuum vessel 1. The cathode electrode 2 is fixed on the bottom of vacuum vessel 1 through the insulating material 8 and the opposite electrode 3 is fixed on the surface of vacuum vessel 1 through the intermediary of another insulating material 9 while substrate holders 10 are fixed on the surfaces opposite to the cathode electrode 2 of opposite electrode 3. A power supply system 7 to impress the cathode electrode 2 with specified high frequency voltage, an exhaust system 11 to control the vacuum degree in vacuum vessel 1 to specified value and a gas supplying system to supply a discharge region with material gas etc. are provided. A grid electrode is fixed to the substrate holders 10 detachably to make replacement very easy while it is electrically connected to the substrate holders 10 to impress itself with the potential similar to that of of substrate stabilizing the film quality. |
