| 摘要 |
PURPOSE:To accurately inspect by holding a sample so that the main surface of the sample becomes vertical and inspecting it, thereby reducing dusts falling on the sample. CONSTITUTION:A mask 30 placed on a sample holder 32 is rotated at the holder 32, held vertically with respect to the sample guide surface of a rail 31, moved down along a guide 35, and transferred to an inspecting position in a clean air. A shutter is closed to prevent dusts from entering into a device. A laser light is scanned laterally of the mask 30 by a galvanic mirror 39, while the mask 30 is moved down, and a foreign material on the main surface of the mask 30 is inspected by a detector 45. Similarly, a foreign material on the back surface of the mask 30 is inspected in combination of a galvanic mirror 40 and a detector 46. Eventually, a flaw of the mask 30 is inspected in combination of a galvanic mirror 41 and a detector 47. |
