| 摘要 |
PURPOSE:To obtain high-density recording with a ring head and high sensitivity of reproduction by shooting a magnetic metal at a nonmagnetic substrate while moving the substrate, and then vapor-depositing the partially oxidized metal on the substrate. CONSTITUTION:A guide roll 11 is arranged between an unwinding roll 5 and a winding roll 6, and a region wherein a tape-shaped substrate (a) is sent obliquely downward and a region wherein the tape is horizontally traveled are formed. A water-cooled can 4 and a supporting box 12 are furnished to the rear surface in the respective regions. Each separate vapor-deposition source 7 and 7 which is heated by an electron beam is provided at the lower part, and metallic materials (b) and (b) to be heated and evaporated are provided on the respective upper surfaces. An incidence angle thetamax to the surface of the substrate (a) is regulated 90 deg. in the initial stage, and the incidence angle thetamin in the final stage is regulated to 20 deg.. After the inclined incident vapor deposition through an inclined space surface, vertical vapor deposition is carried out, and O2 is supplied through an O2-introducing pipe 10 which is opened at the vicinity of the horizontal space surface. A vertical magnetic film contg. metallic particles in a specified ratio on whose surface an oxidized film is formed can be obtained as the surface layer.
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