| 摘要 |
PURPOSE:To trim a resonance frequency easily and accurately and also to decrease the effect to the resonance frequency characteristics, by unifying at least a pair of trimming projections which protrude to an outer side of the surface direction from the corner part of an oscillation substrate to the substrate. CONSTITUTION:A piezoelectric element 3 is supported by a holding frame 5 via connectors 4a and 4b. An oscillation substrate, the connectors 4a and 4b and the frame 5 are unified into a frame 7 by means of a constantly elastic metallic plate. A piezoelectric thin film 8 is stuck to a prescribed area on a surface of the frame 7. In addition, a lead part 10 reaching a prescribed corner part of the frame 5 from an oscillation electrode film 9 and an electrode film 9 via the connector 4a is vapor-deposited on the film 8. Then at least a pair of trimming projections 13 are unified with the substrate 6. In this example, the projections 13 are formed at four corners of the substrate 6 in the form of square bars protruding to an outer side of the surface direction and simultaneously with formation of the frame 7. The variance of resonance frequencies of an resonator is corrected by trimming the projections 13 with a laser processing, etc. |
